▎ 摘　　要

NOVELTY - Producing graphene atomic layer etched graphene, comprises (a) providing self-assembled monolayer mask on surface the graphene having at least one layer, and (b) irradiating energy sources on the graphene for etching. USE - The graphene is useful for producing electronic component (claimed). DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for graphene produced by the above method.