▎ 摘　　要

NOVELTY - Microbolometer has a multilayer (102) graphene structure suspended over a substrate and between electrical contacts. The multilayered graphene structure comprises overlapping graphene monolayers (101) of less than or equal to 10 nm and nanoparticles (103) dispersed within the overlapping graphene monolayers, where the nanoparticles comprise one of vanadium oxide nanoparticles or silicon nanoparticles. First and second conductive contacts are in electrical communication with the multi-layer graphene structure. A layer of amorphous silicon/vanadium oxide is formed on the substrate. The layer defines a cavity to create a gap between the multi layer graphene structure and the substrate such that the multi layered graphene structure is suspended above the substrate, where a sensing circuitry detects changes in input impedance between the conductive terminals using complementary metal oxide semiconductor readout circuitry. USE - The microbolometer is useful as light detector e.g. infrared detector, which is used in optical circuits and components, emitters, modulators, repeaters, waveguides, fibers, reflectors, resonators, detectors and IR focal plane arrays. ADVANTAGE - The detection circuit provides electrical outputs for sufficient light detection from the nanoparticle bundled graphene article in the proximity of the predefined region by use of pre-amplification. It provides thermal isolation from the surrounding environment. The electrical contacts provide electrical communication but also are designed for maximum thermal isolation. Use of high resistance metals e.g. nickel is required to achieve this. The light detection can be integrated with semiconductor circuits including complementary metal-oxide semiconductor circuits which provide pixel array x-y controls, pre- amplification of the modulated resistance signal from the IR detector and the conversion of the analog signal to digital. DESCRIPTION OF DRAWING(S) - The figure shows a cross-section of the multilayer graphene nanoparticle structure. Monolayer (101) Multilayer (102) Nanoparticle (103) Polyimide layer (104)