• 专利标题:   Electronic apparatus has peeling prevention sections that are set with insulating film exposed from hole, and flange section that is contacted with one surface of graphene film inserted by insulating film and flange section.
  • 专利号:   JP2017157630-A
  • 发明人:   KOJIMA E
  • 专利权人:   DENSO CORP
  • 国际专利分类:   C23C028/00, H01L021/28
  • 专利详细信息:   JP2017157630-A 07 Sep 2017 H01L-021/28 201765 Pages: 9 Japanese
  • 申请详细信息:   JP2017157630-A JP037900 29 Feb 2016
  • 优先权号:   JP037900

▎ 摘  要

NOVELTY - The electronic apparatus (1) has a graphene film (4) that is arranged on the insulating film. A peeling prevention section (6) is provided with the material whose adhesiveness with the insulating film is set higher than the graphene film arranged at the hole. The peeling prevention sections are provided with the insulating film exposed from the hole, while arranging the main-section (6a) at the hole in closely contact state. A flange section (6b) is contacted with one surface of the graphene film which is inserted by the insulating film and the flange section. USE - Electronic apparatus. ADVANTAGE - The graphene film peels from the insulating film in the point view is suppressed. The dielectric breakdown generated by the electric field concentration by arranging the peeling prevention section is suppressed. DETAILED DESCRIPTION - A current pathway is provided between a pair of electrodes arranged on one surface (4a) on the opposite side to the insulating film side of the graphene films. The hole (7) exposing the insulating film in the lamination direction of the substrate, the insulating film, and graphene film is formed in the graphene film. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the electronic apparatus. Electronic apparatus (1) Graphene film (4) Surface of insulating film (4a) Peeling prevention section (6) Main-section (6a) Flange section (6b) Hole exposing of insulating film (7)