▎ 摘　　要

NOVELTY - The apparatus (100) has a roll-to-roll mechanism which is configured to transport a film-forming target (S). The roll-to-roll mechanism is provided with a tensile force relaxation unit which is configured to relax a tensile force applied to the transported film-forming target. A heating unit is configured to heat the film-forming target transported by the roll-to-roll mechanism. The tensile force relaxation unit is provided with a pinch roll configured to sandwich the film-forming target. The film-forming target includes a metallic foil containing copper. USE - Film-forming apparatus for forming graphene film on film-forming target such as metallic foil. ADVANTAGE - Since the tensile force applied to the film-forming target can be relaxed by the roll-to-roll mechanism, the film quality can be prevented from deteriorating due to deformation of the film-forming target by the tensile force. Hence high-quality graphene can be produced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a film-forming method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the film-forming apparatus. Film-forming apparatus (100) Chamber (101) Unwinding roll (102) Winding roll (106) Film-forming target (S)