• 专利标题:   Graphene tunneling effect transistor has near-source gate, near-drain gate, and middle gate that are filled with three kinds of metal materials such that gate oxide layer is located between gate and intrinsic graphene nanoribbon.
  • 专利号:   CN108630746-A
  • 发明人:   WANG W, LI W, SHEN Z
  • 专利权人:   UNIV NANJING POSTS TELECOM
  • 国际专利分类:   B82Y040/00, H01L029/06, H01L029/10, H01L029/16, H01L029/423, H01L029/739
  • 专利详细信息:   CN108630746-A 09 Oct 2018 H01L-029/06 201871 Pages: 10 Chinese
  • 申请详细信息:   CN108630746-A CN10384089 25 Apr 2018
  • 优先权号:   CN10384089

▎ 摘  要

NOVELTY - The transistor has a source (1), a drain (2), a channel, a gate oxide layer and a gate electrode. The channel is located between the source and the drain and is made of graphene nanoribbons. The channel has a near-source N-type heavily doped region (41), a near-source N-type gradient doped region (42), an intrinsic graphene nano-ribbon (43), a near-drain N-type gradient doped region (44), a near-drain N-type heavily doped region (45). A gate (3) has a near-source gate (31), a near-drain gate (32), and a middle segment gate. The near source and drain gates are located on the source and drain sides. The middle segment gate is located between the near source and drain gates. The near-source gate, the near-drain gate, and the middle gate are filled with the metal materials. The work functions of the metal materials of the near source gate, the middle gate and the near drain gate are M1, M2, and M3. A gate oxide layer is located between the gate and the intrinsic graphene nanoribbon. USE - Graphene tunneling effect transistor with gradient doped heterogeneous material gate structure. ADVANTAGE - The graphene tunneling effect transistor with gradient doped heterogeneous material gate structure has a lower leakage current and subthreshold swing, and a larger switching current ratio. The gradient doped region in the channel can weaken the electric field in the channel such that the gate capacitance is reduced and the cutoff frequency is improved. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the graphene tunneling effect transistor. Source (1) Drain (2) Gate (3) Near-source gate (31) Near-drain gate (32) Near-source N-type heavily doped region (41) Near-source N-type gradient doped region (42) Intrinsic graphene nano-ribbon (43) Near-drain N-type gradient doped region (44) Near-drain N-type heavily doped region (45)