• 专利标题:   Forming graphene layer directly on a substrate e.g. single crystalline sapphire substrate which is used in structure, comprises depositing carbon atoms that form graphene layer on top surface of substrate.
  • 专利号:   US2013285014-A1, US9236250-B2
  • 发明人:   CHU J O, DIMITRAKOPOULOS C D, FREITAG M O, GRILL A, MCARDLE T J, WISNIEFF R L
  • 专利权人:   INT BUSINESS MACHINES CORP, GLOBALFOUNDRIES INC
  • 国际专利分类:   H01L021/02, H01L029/16, H01L029/267
  • 专利详细信息:   US2013285014-A1 31 Oct 2013 H01L-021/02 201376 English
  • 申请详细信息:   US2013285014-A1 US924064 21 Jun 2013
  • 优先权号:   US942490, US924064

▎ 摘  要

NOVELTY - Forming a graphene layer (130) directly on a substrate (410) comprising a single crystalline sapphire substrate or a single crystalline silicon carbide substrate, comprises depositing carbon atoms that form the graphene layer on a top surface (21) of the substrate. USE - The method is useful for forming a graphene layer directly on a substrate which is used in a structure (claimed). ADVANTAGE - The method provides graphene layer which are utilized in devices that are manufactured at a low cost. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a structure comprising a graphene layer located on a single crystalline sapphire substrate. DESCRIPTION OF DRAWING(S) - The figure shows a vertical cross-sectional view of the structure. Top surface (21) Graphene layer (130) Single crystalline semiconductor-carbon alloy layer (320) Substrate (410)