• 专利标题:   Processing holographic laser-based metal composite graphene surface involves growing graphene film layer on grating substrate, spin-coating photoresist film on graphene film layer, carrying out holographic lithography and developing.
  • 专利号:   CN106324729-A
  • 发明人:   ZOU W, ZOU Y
  • 专利权人:   SUZHOU 6328 PHOTOELECTRIC TECHNOLOGY CO LTD
  • 国际专利分类:   G02B005/02
  • 专利详细信息:   CN106324729-A 11 Jan 2017 G02B-005/02 201713 Pages: 10 Chinese
  • 申请详细信息:   CN106324729-A CN10846211 23 Sep 2016
  • 优先权号:   CN10846211

▎ 摘  要

NOVELTY - Processing holographic laser-based metal composite graphene surface comprises growing graphene film layer (14) on grating substrate (5); spin-coating photoresist film (15) on graphene film layer; carrying out holographic lithography and developing; ion beam etching; plating surface-enhanced Raman scattering metal active layer (16); and soaking in photoresist solution and peeling off photoresist layer. USE - Method for processing holographic laser-based metal composite graphene surface (claimed). DESCRIPTION OF DRAWING(S) - The drawing shows a holographic laser-based metal composite graphene surface processing. Grating substrate (5) Graphene film layer (14) Photoresist film (15) Surface-enhanced Raman scattering metal active layer (16)