▎ 摘 要
NOVELTY - The method involves using a piezoelectric sheet and polyimide as a substrate. A graphene electrode is processed into electrode shape by adsorption force. Continuous controllable voltage is provided to the piezoelectric sheet. Expanding and extending process is performed. An electromigration process is used to burn the graphene electrode to form very small gap. A polyimide insulating layer is used for isolating piezoelectric and graphene. The graphene is etched into electrode shape by reactive ion etching process. A large scale graphene electrode array is obtained. Distance between the electrodes is adjusted. USE - Method for arranging graphene nano-electrode array with continuous controllable gap on a sheet. ADVANTAGE - The method ensuring simple process, low cost, realizing large-scale integration of graphene electrode of controllable gap, laying the foundation for development of carbon-based molecular electronic device, and accurately controlling the distance between the electrodes to efficiently connect the single molecule so as to realize high yield large area on the carbon based single molecule electronic component.