• 专利标题:   Method for arranging graphene nano-electrode array with continuous controllable gap on sheet, involves performing expanding and extending process, and using electromigration process to burn graphene electrode to form very small gap.
  • 专利号:   CN113548642-A
  • 发明人:   LIU H, ZHAO Z, ZHAO X, NI L, TAN M, XIANG D
  • 专利权人:   UNIV NANKAI
  • 国际专利分类:   B82Y040/00, B82Y030/00, B82Y010/00, B82B003/00
  • 专利详细信息:   CN113548642-A 26 Oct 2021 B82B-003/00 202204 Chinese
  • 申请详细信息:   CN113548642-A CN10822784 21 Jul 2021
  • 优先权号:   CN10822784

▎ 摘  要

NOVELTY - The method involves using a piezoelectric sheet and polyimide as a substrate. A graphene electrode is processed into electrode shape by adsorption force. Continuous controllable voltage is provided to the piezoelectric sheet. Expanding and extending process is performed. An electromigration process is used to burn the graphene electrode to form very small gap. A polyimide insulating layer is used for isolating piezoelectric and graphene. The graphene is etched into electrode shape by reactive ion etching process. A large scale graphene electrode array is obtained. Distance between the electrodes is adjusted. USE - Method for arranging graphene nano-electrode array with continuous controllable gap on a sheet. ADVANTAGE - The method ensuring simple process, low cost, realizing large-scale integration of graphene electrode of controllable gap, laying the foundation for development of carbon-based molecular electronic device, and accurately controlling the distance between the electrodes to efficiently connect the single molecule so as to realize high yield large area on the carbon based single molecule electronic component.