• 专利标题:   Graphene FET terahertz wave adjustor, has medium layer made of aluminum oxide layer with specific thickness, and graphene thin film and source leakage and annular grate electrodes formed at back of semiconductor substrate.
  • 专利号:   CN104678597-A
  • 发明人:   CHEN Z, SHEN Y, WEN Q, TIAN W, YANG Q, ZHANG H, MAO Q
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   G02F001/015
  • 专利详细信息:   CN104678597-A 03 Jun 2015 G02F-001/015 201560 Pages: 10 Chinese
  • 申请详细信息:   CN104678597-A CN10359765 25 Jul 2014
  • 优先权号:   CN10359765

▎ 摘  要

NOVELTY - The adjustor has a semiconductor substrate formed on a medium layer. A graphene thin film, a source leakage electrode and an annular grate electrode are formed at the back side of the semiconductor substrate. The medium layer is made of aluminum oxide layer whose thickness is 5-100 nanometers. The semiconductor substrate is doped with a semiconductor silicon chip e.g. germanium substrate and silicon carbide, whose thickness is 50 to 500 micrometers. The source leakage electrode and the grate electrode are made of metals e.g. silver, gold, copper and nickel. USE - Graphene FET terahertz wave adjustor. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a graphene FET terahertz wave adjustor.