• 专利标题:   Method for manufacturing graphene transistor, involves laminating insulating layer in semiconductor device, providing drain and gate electrode metal layer that is laminated on source.
  • 专利号:   KR1113287-B1, KR2012029664-A
  • 发明人:   LEE K J, CHOI I S, CHOI S Y, HONG B H
  • 专利权人:   KOREA ADV INST SCI TECHNOLOGY
  • 国际专利分类:   H01L021/336, H01L029/78, H01L021/027
  • 专利详细信息:   KR1113287-B1 24 Feb 2012 H01L-021/336 201220 Pages: 33
  • 申请详细信息:   KR1113287-B1 KR112383 31 Oct 2011
  • 优先权号:   KR091600, KR112383

▎ 摘  要

NOVELTY - The method involves forming a graphene laser beam that is irradiated in a silicon carbide (Sic) substrate. Gas atmosphere is irradiated in amount rear area of a semiconductor device. An insulating layer is laminated in the semiconductor device. A drain and gate electrode is provided with in a metal layer that is laminated on a source. width of a nano ribbon is 10nm Lee. USE - Method for manufacturing a graphene transistor. ADVANTAGE - The method enables improving profitability and reducing manufacturing cost. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene transistor manufacturing method.