• 专利标题:   Concave-array graphene-metal hetero-junction photo-detector used for light detection, has groove whose two sides in third convex surface on graphene layer are respectively provided with high and low work function electrodes.
  • 专利号:   CN110148642-A, CN210272383-U
  • 发明人:   LI Q, ZHANG Q, ZHU X, PENG H, LIU W, SONG H, LI T, LIU L, WANG H, HUANG R
  • 专利权人:   UNIV GUANGXI NORMAL
  • 国际专利分类:   H01L031/0236, H01L031/11
  • 专利详细信息:   CN110148642-A 20 Aug 2019 H01L-031/0236 201979 Pages: 12 Chinese
  • 申请详细信息:   CN110148642-A CN10540487 21 Jun 2019
  • 优先权号:   CN10540487, CN20946522

▎ 摘  要

NOVELTY - The photodetector has a graphene layer (4) which is provided with a third convex surface (41) which is convex downward and matched with the inner groove of the second convex surface (31). The inner groove of the second convex surface has a one-to-one correspondence with the third convex surface. The inner surface of the inner concave surface of the third convex surface of the graphene layer is provided with an anti-reflection layer. Two sides of the groove in the third convex surface on the graphene layer are respectively provided with a high work function electrode (6) and a low work function electrode (7) of a wavy interdigitated finger. The growth layer is formed by depositing copper or gold or silver or molybdenum and depositing nickel. The low work function electrode is made of titanium, platinum, manganese, lithium or aluminum. The high work function electrode is made of gold, silver, nickel or palladium. USE - Concave-array graphene-metal hetero-junction photo-detector used for light detection and optical communication. Can also be used for ray measurement and detection, industrial automatic control, photometric measurement, missile guidance, infrared thermal imaging and infrared remote sensing. ADVANTAGE - The photodetector can quickly detect optical signals of different wavelengths and light intensity at normal temperature, and has small volume and high integration. The device is relatively simple to prepare and compatible with semiconductor fabrication processes, enabling mass production. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic exploded view of concave-array graphene-metal hetero-junction photo-detector. Substrate (1) Graphene layer (4) High work function electrode (6) Low work function electrode (7) Convex surface (31,41)