▎ 摘　　要

NOVELTY - Semiconductor process wastewater treatment system has a processing unit (100) configured to receive semiconductor process wastewater and treat the semiconductor process wastewater through many operations and a membrane filtration tank (300) arranged separately from the processing unit, the membrane filtration tank having a ceramic nano-membrane for filtering the semiconductor process wastewater which has passed through the processing unit, the ceramic nano-membrane includes a carbon-based nano-material. USE - Semiconductor process wastewater treatment system used for removing ionic substances such as ammonium ions and fluorine ions. Can also be used for treating wastewater from display devices and other electronic devices. ADVANTAGE - Semiconductor process wastewater treatment system which is economical, and easily and efficiently remove ionic substances such as nitrogen components and fluorine components from semiconductor wastewater, without separate chemical injection and without requiring high operating costs, excellent filtration performance and high efficiency, excellent removal efficiency for ionic components that were previously difficult to remove is achieved due to a synergy effect of the excellent properties such as high water permeability and high strength of the ceramic material and the excellent filtration properties of the nano-membrane. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: (1) Nano-membrane filter for semiconductor process wastewater treatment has a porous membrane main body including a metal oxide forming a network structure forming a many pores and coating layer which is coated at least on a surface or inside of the membrane main body and includes a carbon-based nanomaterial. (2) Semiconductor process wastewater treatment method for treating semiconductor process wastewater by using the semiconductor process wastewater treatment system. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of semiconductor process wastewater treatment system. First anoxic tank (110) First oxic tank (120) Second anoxic tank (130) Second oxic tank (140) Clarifier (200) Membrane filtration tank (300)