▎ 摘　　要

NOVELTY - The sensor has a coplanar waveguide unit arranged on a substrate. A measuring unit is arranged on a side of a coplanar waveguide structure. The coplanar waveguide unit is fixed with a coplanar waveguide structure and an absorption resistor. The coplanar waveguide structure receives a microwave signal and transmits the microwave signal to the absorption resistor. A graphene thin film induces increase in temperature of the absorption resistor and decreases a resistance value and changes regulation voltage applied to a driving electrode such that resistance value of the graphene thin film returns to an initial value to achieve microwave power measurement of the microwave signal, where a material of a medium layer is silicon dioxide or silicon nitride. USE - Microwave power sensor. ADVANTAGE - The sensor has simple structure, high sensitivity, large measuring range, high measuring precision, small volume, compatibility with silicon or gallium arsenide process, low production cost and satisfies requirements of integrated circuits for devices, and improves applicability. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a microwave power measuring method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a microwave power sensor.