• 专利标题:   Manufacturing optical device by forming resist of predetermined shape on multilayer graphene, and processing multilayer graphene together with resist, removing resist covering, and providing electrode covering exposed inclined end face of multilayer graphene.
  • 专利号:   JP2023067627-A
  • 发明人:   KONDO D, HAYASHI K, ASO H
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   B82Y040/00, C01B032/194, H01L027/146, H01L029/06, H01L029/16, H01L029/786, H01L031/02, H01L031/08, H10K010/40, H10K071/10, H10K085/20
  • 专利详细信息:   JP2023067627-A 16 May 2023 H01L-031/08 202348 Pages: 26 Japanese
  • 申请详细信息:   JP2023067627-A JP179037 01 Nov 2021
  • 优先权号:   JP179037

▎ 摘  要

NOVELTY - Method for manufacturing an optical device, involves forming a resist of a predetermined shape on multilayer graphene, and processing the multilayer graphene together with the resist into a tapered shape by anisotropic etching using oxygen, removing the resist covering the inclined end face of the processed multilayer graphene, and providing an electrode covering the exposed inclined end face of the multilayer graphene. USE - The method is used for manufacturing an optical device, light-emitting layer and electrodes for conducting current. ADVANTAGE - The method manufactures optical device in which contact resistance between multilayer graphene and electrodes is reduced.