• 专利标题:   Method of regulation of electronic structure of graphene thin film, invovles depositing metal nanoparticles on target substrate which is passed into deposition chamber into which inert gas of atmospheric pressure is injected.
  • 专利号:   CN105132883-A
  • 发明人:   CAI X, JIN H, ZHOU Z
  • 专利权人:   CHANGZHOU 2D CARBON GRAPHENE MATERIAL CO
  • 国际专利分类:   C23C014/18, C23C014/24, C23C016/26
  • 专利详细信息:   CN105132883-A 09 Dec 2015 C23C-016/26 201608 Pages: 7 English
  • 申请详细信息:   CN105132883-A CN10523659 24 Aug 2015
  • 优先权号:   CN10523659

▎ 摘  要

NOVELTY - The method involves growing graphene on a substrate chemical vapor deposition. The target substrate is placed in the deposition chamber and vapor deposition chamber is evacuated. A metal evaporation source is heated to temperature above the melting point of the metal. The metal nanoparticles are deposited on the target substrate which is passed into the deposition chamber into which inert gas of atmospheric pressure is injected. The graphene grown on the substrate is transferred and deposited on the target substrate to obtain graphene transparent conductive film. USE - Method of regulation of electronic structure of graphene thin film. ADVANTAGE - The carrier concentration is increased so that performance of the thin film is improved and durability of the film is improved.