• 专利标题:   Method for forming graphene-based surface plasmon resonance sensor for analyzing chemical samples, involves depositing bulk graphene onto corrugate surface of dielectric layer, where surface of dielectric layer provides periodic regions.
  • 专利号:   US2016341661-A1, US9594018-B2
  • 发明人:   AVOURIS P, FARMER D B, LI Y, YAN H
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   G01N021/552, H01L021/02, H01L021/027, H01L021/04, H01L021/311, G01N021/75
  • 专利详细信息:   US2016341661-A1 24 Nov 2016 G01N-021/552 201682 Pages: 17 English
  • 申请详细信息:   US2016341661-A1 US225286 01 Aug 2016
  • 优先权号:   US313456, US225286

▎ 摘  要

NOVELTY - The method involves patterning trenches at regular intervals in a dielectric layer (104b) to transform the dielectric layer into a corrugated surface comprising a series of grooves and ridges. Bulk graphene is deposited onto the corrugate surface of the dielectric layer, where the corrugated surface of the dielectric layer provides periodic regions of differing permittivity beneath the bulk graphene comprising first regions provided with first permittivity to light (2006) and second regions provided with second permittivity to light. USE - Method for forming a graphene-based surface plasmon resonance (SPR) sensor for analyzing chemical and biological samples. ADVANTAGE - The method enables facilitating high carrier mobility and conductivity by a lattice structure of graphene that allows for high plasmon field confinement and large plasmon propagation lengths as compared to gold surfaces of similar thickness. The method enables using the bulk graphene to eliminate steps needed to pattern graphene nanoribbons, thus simplifying process and lowering overall production costs. DETAILED DESCRIPTION - The bulk graphene comprises a graphene monolayer. DESCRIPTION OF DRAWING(S) - The drawing shows a functional block diagram of a SPR sensor for analyzing a sample. Substrate (104) Dielectric layer of substrate (104b) Light source (2002) Detector (2004) Light (2006)