▎ 摘 要
NOVELTY - Tunable terahertz polarization insensitive electromagnetic induction transparent device based on graphene meta material composed of periodic structure comprises multiple basic units arranged along the same direction periodically on the plane, each basic unit comprises two layers, where upper layer is patterned graphene layer, and lower layer is a dielectric layer. The actual processing procedure involves forming a medium layer film on the substrate, plating a layer of graphene film on the medium layer by chemical method or physical method to form graphene layer based on the set period and number of basic unit, engraving the graphene by photo etching or electron beam exposure, removing the redundant graphene film to form four adjacent sides of the graphene square ring opening at the same horizontal position, forming a graphene layer of the periodic structure, and plating a layer of conductive adhesive on the graphene layer when all graphene layers are etched at one time. USE - Tunable terahertz polarization insensitive electromagnetic induction transparent device for sensing and single/double mode photoelectric switch device field, and used in optical memory, slow light device, sensor, national defense safety biomedicine and wireless communication. ADVANTAGE - The device realizes adjustable electromagnetic induction transparent phenomenon by adjusting external voltage without changing a device structure. The device utilizes semi-metal property of graphene, external voltage and changing a Fermi level to effectively control frequency and amplitude of a transparent window, which promotes development of a terahertz wave band adjustable device.