• 专利标题:   Semiconductor device manufacturing method, involves forming graphene layer with substrate layer, where medium layer is formed with upper end of graphene layer and bump structure, and forming mask side wall with etching layer.
  • 专利号:   CN103972087-A
  • 发明人:   ZHU H, GU K
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   B82Y010/00, H01L021/336, H01L029/786
  • 专利详细信息:   CN103972087-A 06 Aug 2014 H01L-021/336 201469 Pages: 9 Chinese
  • 申请详细信息:   CN103972087-A CN10031147 28 Jan 2013
  • 优先权号:   CN10031147

▎ 摘  要

NOVELTY - The method involves forming a graphene layer with a substrate layer, where a medium layer is formed with an upper end of the graphene layer and a bump structure. A mask side wall is formed with an etching layer, the medium layer and the graphene layer, where the medium layer is made of silicon dioxide, silicon nitride, silicon oxynitride, silicon oxide, oxide, hafnium or titanium nitride solution. A graphene nanometer belt is formed with the graphene layer and fixed with the mask side wall. USE - Semiconductor device manufacturing method. ADVANTAGE - The method enables providing simple process, reducing temperature consumption and improving deposition and smoothening efficiency so as to produce enough energy gap of a graphene device in an efficient manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a semiconductor device.