• 专利标题:   Semiconductor device e.g. memory device or transistor, has two-dimensional material channel layer arranged on substrate, where 2D material passivation layer is arranged on 2D material channel layer, and source/drain contacts are arranged on 2D material passivation layer.
  • 专利号:   US2023088634-A1, TW202315129-A
  • 发明人:   TSAI P, LIN S
  • 专利权人:   UNIV TAIWAN NAT, TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD, UNIV TAIWAN NAT
  • 国际专利分类:   H01L027/11582, H01L029/16, H01L029/417, H01L029/66, H01L029/786, H01L021/306, H01L021/76, H01L029/778
  • 专利详细信息:   US2023088634-A1 23 Mar 2023 H01L-029/786 202327 English
  • 申请详细信息:   US2023088634-A1 US691977 10 Mar 2022
  • 优先权号:   US245471P, US691977

▎ 摘  要

NOVELTY - The device has a two-dimensional (2D) material channel layer (110) arranged on a substrate (100), where a 2D material passivation layer is arranged on the 2D material channel layer. Multiple source/drain contacts are arranged on the 2D material passivation layer, where a gate structure is arranged on the 2D material passivation layer and between the source/drain contacts. A charge storage layer is arranged on the 2D material passivation layer, wherein the charge storage layer is narrower than the 2D material passivation layer. The gate structure comprises a gate dielectric layer, where a gate electrode is arranged on the gate dielectric layer. USE - Semiconductor device e.g. memory device or transistor (all claimed). ADVANTAGE - The device has high manufacturing efficiency and low manufacturing associated costs and small size. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: (1) a memory device; and (2) a method for manufacturing a semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a semiconductor device. 100Semiconductor device 1102D material channel layer 110CHChannel region 120Material layer M1Patterned mask