• 专利标题:   Method for converting single wall carbon nanotubes into graphene sheets, involves etching latent defects in single wall carbon nanotubes with provided plasma and splitting carbon nanotubes in longitudinal direction resulting in sheets.
  • 专利号:   US10593883-B1
  • 发明人:   EGERTON E J, SOOD A K
  • 专利权人:   MAGNOLIA OPTICAL TECHNOLOGIES INC
  • 国际专利分类:   H01L027/30, H01L051/00, H01L051/42, H01L051/44
  • 专利详细信息:   US10593883-B1 17 Mar 2020 H01L-051/00 202028 Pages: 14 English
  • 申请详细信息:   US10593883-B1 US384248 19 Dec 2016
  • 优先权号:   US308688, US384248

▎ 摘  要

NOVELTY - The method involves providing the hydrogen plasma at a temperature. The latent defects in single wall carbon nanotubes are etched with the provided plasma. The single wall carbon nanotubes are split in a longitudinal direction resulting in the graphene sheets. A diameter of the carbon nanotubes is not a factor in the 1 to 5 nm range. The hydrogen plasma is occurred during gas flow uniformity and radio frequency uniformity resulting in substrate etching uniformity. The temperature is in a range of 32-200 degrees Fahrenheit. USE - Method for converting single wall carbon nanotubes into graphene sheets used in solar cell. ADVANTAGE - The elimination of Nyquist limited behavior within optical system significantly improves the performance of infrared ray (IR) detection systems. Since the substrate influences the detection of radiation, the suspended region diminishes any disadvantageous substrate thermal isolation effects. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the micro bolometer detecting element. Detecting element (100) Infrared ray detector (101) Complementary metal oxide semiconductor logic (110) Film (120) Infrared ray sensor (130)