▎ 摘　　要

NOVELTY - A circuit apparatus comprises electrically joined graphene film and metal electrode, and aluminum oxide layer formed directly under the graphene film. Graphene film and metal layer are directly joined, and an uneven structure is formed on the joining location. The uneven structure is cone-shaped recessed part formed on the aluminum oxide film. Metal layer is formed so that the graphene film is covered and the cone-shaped recessed part is filled up. USE - Circuit apparatus for electron and optical integrated circuit apparatus. ADVANTAGE - Contact resistance between graphene film and metal electrode is reduced and the circuit apparatus is low cost. DETAILED DESCRIPTION - A circuit apparatus comprises electrically joined graphene film and metal electrode, and aluminum oxide layer formed directly under the graphene film. Aluminum oxide film composition is Al2-xO3+x, where x is greater than or equal to 0. Graphene film and metal layer are directly joined, and an uneven structure is formed on the joining location. The uneven structure is cone-shaped recessed part formed on the aluminum oxide film. Metal layer is formed so that the graphene film is covered and the cone-shaped recessed part is filled up. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional schematic diagram of the manufacturing procedure of board with graphene film. Board (100) Silicon single crystal substrate (101) Silicon oxide film (102) Aluminum oxide film (103) Graphene film (105) Circuit wiring part (106) Cone-shaped recessed part (108)