• 专利标题:   Graphene based focal plane imaging device comprises multiple graphene-based photosensitive pixels and pixel extraction electrodes and a graphene-based photosensitive pixel with high doped silicon layer on substrate.
  • 专利号:   CN107579128-A, CN107579128-B
  • 发明人:   ZHANG Y, YOU C, DENG W, LIU B
  • 专利权人:   UNIV BEIJING TECHNOLOGY, UNIV BEIJING TECHNOLOGY
  • 国际专利分类:   B82Y030/00, H01L031/028, H01L031/032, H01L031/09, H01L031/18
  • 专利详细信息:   CN107579128-A 12 Jan 2018 H01L-031/032 201810 Pages: 10 Chinese
  • 申请详细信息:   CN107579128-A CN10787812 04 Sep 2017
  • 优先权号:   CN10787812

▎ 摘  要

NOVELTY - Graphene based focal plane imaging device comprises multiple graphene-based photosensitive pixels and pixel extraction electrodes; and a graphene-based photosensitive pixel with high doped silicon layer on substrate, a silicon dioxide insulating layer is arranged on high-doped silicon layer, a graphene layer is arranged on silicon dioxide insulating layer, upper surface of two side portions of graphene layer are two adhesive layers arranged parallel to each other and upper surface of middle portion of graphene layer is parallel to lead sulfide quantum dot layer between two adhesive layers. USE - Used as graphene based focal plane imaging device. ADVANTAGE - The device has high sensitivity and has broad spectral response in visible to near infrared band, and the design of focal plane pixel makes the application of graphene in the field of imaging. DETAILED DESCRIPTION - Graphene based focal plane imaging device comprises multiple graphene-based photosensitive pixels and pixel extraction electrodes; a graphene-based photosensitive pixel having a high doped silicon layer on the substrate, a silicon dioxide insulating layer is arranged on the high-doped silicon layer, a graphene layer is arranged on the silicon dioxide insulating layer, where the upper surfaces of the two side portions of the graphene layer are two adhesive layers which are arranged relatively parallel to each other, and the upper surface of the middle portion of the graphene layer is further relatively parallel to lead sulfide quantum dot layer between two adhesive layers; the two parallel metal adhesive layers are metal electrode layer, one of the two metal electrode layers is a pixel drain electrode and the other is a common source electrode; the multiple graphene-based photosensitive pixels are arranged in parallel in two rows, the common source of the two rows of graphene-based photosensitive pixels inwardly connected to the common source terminal through the common terminal; the two rows of graphene-based photo pixel drains outwardly, and each pixel drain is connected to a drain terminal of a pixel through an electrode lead, the multiple graphene-based light-sensitive picture elements of the substrate highly doped silicon layer and the highly doped silicon layer on the silicon dioxide insulation layer is same in overall structure; the two rows of graphene-based photosensitive pixels are arranged non-symmetrically and cross-spaced asymmetrically; the pixel drain terminal, the electrode terminal, the common terminal, the common source terminal and the alignment mark serves as the pixel lead-out electrodes, and the two sides of the central image element provided with alignment marks for graphene-based photosensitive image intervals. An INDEPENDENT CLAIM is also included for preparing graphene-based focal plane imaging device comprising (i) adopting acetone, isopropanol, deionized water for sequentially washing highly doped silicon substrate with a silicon dioxide layer, (ii) growing copper-based graphene by a chemical vapor deposition method and introducing onto the cleaned silica layer obtained in step (i), (iii) etching the graphene film placing into the silicon dioxide layer in step (ii) into a multiple strip-shaped structures by adopting micro/nano processing technology, and arranging the plurality of graphene based photosensitive pixels in parallel in two rows of graphene layer corresponding position, (iv) evaporating or depositing an adhesive layer on both ends of each strip of graphene layer obtained in step (iii), and depositing a metal electrode and a pixel extraction electrode on the adhesive layer, and (v) spinning a quantum dot layer of lead sulfide on the surface of the graphene strip between two metal electrode pairs obtained in step (iv).