• 专利标题:   Manufacture of graphene structure used in electronic device, involves providing catalyst metal layer on insulation film layer, supplying carbon in plasma state under specified conditions, and forming graphene layer.
  • 专利号:   JP2013177659-A
  • 发明人:   EGAWA T, FUJITA K
  • 专利权人:   UNIV NAGOYA
  • 国际专利分类:   C01B031/02, C23C014/06
  • 专利详细信息:   JP2013177659-A 09 Sep 2013 C23C-014/06 201362 Pages: 7 Japanese
  • 申请详细信息:   JP2013177659-A JP042599 29 Feb 2012
  • 优先权号:   JP042599

▎ 摘  要

NOVELTY - An insulation film layer (3) is formed on a base material (2) and a catalyst metal layer (4) is provided on the insulation film layer. Carbon is supplied in plasma state under high-vacuum degree and temperature, on the catalyst metal layer and the graphene layer (5) is formed to obtain processed graphene structure (1). USE - Manufacture of graphene structure used for electronic devices, e.g. Field Effect Transistor. ADVANTAGE - The graphene structure has favorable thickness and high mobility, excellent ballistic conduction and current density tolerance, and is chemically stable. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of graphene structure. Graphene structure (1) Base material (2) Insulation film layer (3) Catalyst metal layer (4) Graphene layer (5)