▎ 摘　　要

NOVELTY - The micro-mirror has a mirror surface unit (4) connected with an outer frame (1) through a cantilever beam (3). An electrifying coil (2) is located between the cantilevers and the mirror surface units. The coil is provided with a magnetic field. The magnetic field is used to generate electromagnetic force when the coil is energized, so that the mirror face unit moves relative to the outer frame under the action of the electromagnetic force. A portion of a surface layer of the coils is composed of graphene. The outer frame and the coil are connected with each other. USE - Micro-electro-mechanical system (MEMS) micro-mirror for use in an optical scanning device (Claimed) used with vehicle-mounted laser radar. ADVANTAGE - The MEMS micro-mirror has high working reliability. The graphene can form a stable and compact protective layer on the coil surface layer. The coil is prevented from being corroded by the outer environment. The working reliability of the coil is improved, and the graphene itself will not affect the conductive and heat dissipation of coil, the coil itself has good working performance. The production and manufacturing cost of coil is reduced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an optical scanning device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of a MEMS micro-mirror. Outer frame (1) Electrifying coil (2) Cantilever beam (3) Mirror surface unit (4) Hollow area (11) Reflecting mirror (41) Connecting frame (42)