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  • 专利标题:   Apparatus for synthesizing graphene film on copper foil, has quasi enclosed substrate holder including open side, and cap placed over open side, where substrate is located inside holder for graphene film synthesis.
  • 专利号:   US2013089666-A1, US10100402-B2
  • 发明人:   BOI A A, LI X, BOL A A
  • 专利权人:   INT BUSINESS MACHINES CORP, INT BUSINESS MACHINES CORP, BOL A A, LI X
  • 国际专利分类:   B05C013/02, C23C016/26, B82Y030/00, B82Y040/00, C01B032/186, C23C016/458
  • 专利详细信息:   US2013089666-A1 11 Apr 2013 C23C-016/26 201326 Pages: 7 English
  • 申请详细信息:   US2013089666-A1 US269037 07 Oct 2011
  • 优先权号:   US269037

▎ 摘　　要

NOVELTY - The apparatus (102) has a quasi enclosed substrate holder i.e. prolate quartz box (100), which includes an open side, and a cap (110) placed over the open side. A substrate (120) is located inside the holder for graphene film synthesis. The open side includes a gap having width in a range of 1 to 2 mm. The holder includes length and width determined by utilizing chemical vapor deposition chamber size. The cap is made of an inert material such as sapphire or alumina, or copper foil, and the substrate is made of copper foil. USE - Apparatus for synthesizing graphene film on copper foil. ADVANTAGE - The apparatus synthesizes graphene films having larger domain size and less domain boundaries so as to enhance mechanical strength, thermal and electrical transport properties of graphene films and form films with higher quality. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for generating a graphene film. DESCRIPTION OF DRAWING(S) - The drawing shows a top perspective view of an apparatus for synthesizing graphene film. Prolate quartz box (100) Apparatus for synthesizing graphene film on copper foil (102) Cap (110) Substrate (120)