▎ 摘　　要

NOVELTY - The method involves plating a carbon layer on a silicon probe surface to form a carbon layer. A metal is plated on the carbon layer, where the metal is selected from combination of nickel, copper and gold. A metal plating layer is formed. Silicon probes are immersed in liquid-butyl-3-methylimidazole acetate ion. A metal carbide shell layer structure is formed in the silicone probe surface under catalysis of a metal element surface. The silicone probe is quenched to obtain a graphene functionalized silicon probe. Thickness of the carbon layer is calculated about 3nm to 20nm. USE - Method for preparing a graphene functionalized silicon-based probe (claimed). ADVANTAGE - The method enables preparing the graphene functionalized silicon-based probe with excellent needle tip sharpness, conductive performance and oxidation resistance. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene functionalized silicon-based probe. (Drawing includes non-English language text).