▎ 摘　　要

NOVELTY - The device has a micro-structure (1) provided with a beam (11), a substrate (12), a support and an electrode group (14). The beam is made of graphite material. An upper surface of the substrate is formed as a plane-shaped structure. The support comprises a primary support (131) and a secondary support (132). The electrode group comprises multiple electrodes that are formed with a conductive film. A matching circuit (2) comprises a primary resistor (21), a secondary resistor (22), a primary reference source (23), a secondary reference source (24) and an excitation source group. The electrode group performs product summation operation of an AC source and an excitation source corresponding to capacitance of multiple electrodes. An insulating layer, the electrode group and the beam are made of graphite materials. USE - Electrostatic excitation-piezoresistive detection graphene micromechanical resonator device. ADVANTAGE - The device can realize electrical excitation and electrical detection function of graphene resonators. DESCRIPTION OF DRAWING(S) - The drawing shows a circuit block diagram of an electrostatic excitation-piezoresistive detection graphene micromechanical resonator device. Micro-structure (1) Matching circuit (2) Beam (11) Substrate (12) Electrode group (14) Primary resistor (21) Secondary resistor (22) Primary reference source (23) Secondary reference source (24) Primary support (131) Secondary support (132)