• 专利标题:   Graphene-assisted gallium nitride rectifier, has primary ohmic electrode fixed on two sides of upper surface of epitaxial wafer, and graphene layer placed above primary Schottky electrode and metal layer in all areas of air.
  • 专利号:   CN211295107-U
  • 发明人:   LI G, LI X
  • 专利权人:   UNIV SOUTH CHINA TECHNOLOGY
  • 国际专利分类:   H01L021/329, H01L023/373, H01L029/45, H01L029/47, H01L029/861
  • 专利详细信息:   CN211295107-U 18 Aug 2020 H01L-029/45 202076 Pages: 8 Chinese
  • 申请详细信息:   CN211295107-U CN22389503 27 Dec 2019
  • 优先权号:   CN20423353, CN22389503

▎ 摘  要

NOVELTY - The utility model claims a graphene auxiliary GaN rectifier. The rectifier comprises an epitaxial wafer, a primary Schottky electrode and a primary ohmic electrode respectively set on two sides of the upper surface of the epitaxial wafer and not interconnected, a graphene layer set above the primary Schottky electrode and the primary ohmic electrode, a metal layer set on the graphene layer, a Schottky metal layer set on the Schottky electrode part metal layer, a patterned passivation layer set on the ohmic electrode graphene layer upper metal layer and Schottky electrode part Schottky metal layer; a top electrode layer set at the pattern passivation layer opening; the Schottky metal layer exposes the primary Schottky electrode; the graphene layer and the metal layer above the primary Schottky electrode are exposed in all areas of the air. The rectifier of the utility model can reduce the high-frequency working thermal breakdown frequency of the GaN rectifier and effectively enhance the electrode current expanding capability of the GaN rectifier.