• 专利标题:   Method for coating metal substrate e.g. metal foil, with graphene layer, involves contacting molten metal layer with carbon source gas, solidifying molten metal layer, and transferring metal substrate out of processing chamber.
  • 专利号:   US2019368032-A1
  • 发明人:   HARUTYUNYAN A R
  • 专利权人:   HONDA MOTOR CO LTD
  • 国际专利分类:   C23C016/02, C23C016/26, C23C016/52, C23C016/54
  • 专利详细信息:   US2019368032-A1 05 Dec 2019 C23C-016/02 201996 Pages: 15 English
  • 申请详细信息:   US2019368032-A1 US546169 20 Aug 2019
  • 优先权号:   US310350P, US546169

▎ 摘  要

NOVELTY - The method involves providing a metal substrate (1). The metal substrate is continuously forwarded through a processing chamber (2), where the processing chamber comprises multiple heating elements (3). Electromagnetic radiation is provided to the metal substrate through the heating elements to heat the metal substrate. A molten metal layer (6) is formed on a top surface of the metal substrate. The molten metal layer is contacted with carbon source gas to form a graphene-comprising coating (7) for covering the molten metal layer of the top surface of the metal substrate. The molten metal layer is solidified. The metal substrate including the graphene-comprising coating is transferred out of the processing chamber, where the carbon source gas comprises methane, ethylene, acetylene, ethanol, benzene, methanol, carbon-based polymer and nano-carbon material. USE - Method for coating a metal substrate e.g. metal foil, metal film and metal wire (all claimed), with a graphene layer. ADVANTAGE - The method enables utilizing the coating to interconnect with graphene so as to prevent copper from penetrating through a dielectric insulating layer. The method enables selecting thickness of the molten metal layer, so that a solutal Marangoni number for a surface-melted metal-carbon system is lower than critical number, thus preventing convection flow in the melted layer, hence preventing formation of cellular ripples on the surface of the melted layer. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a processing chamber. Metal substrate (1) Processing chamber (2) Heating element (3) Molten metal layer (6) Graphene-comprising coating (7)