▎ 摘　　要

NOVELTY - Electro-osmotic pump includes a membrane (11) that allows fluid movement, and a first electrode (130) and a second electrode (150) respectively provided on both sides of the membrane. The first electrode and the second electrode are formed of an impermeable substrate material and an electrode material coated and have one fluid pathway. The impermeable substrate material is a plate-shaped substrate including one of a conducting material, a semiconducing material and a non-conducting material. USE - Electro-osmotic pump for electrode (claimed). ADVANTAGE - The electro-osmotic pump provides scalability by which much more diverse electrode materials is coated on the surface of an electrode in various ways, and also simplicity in the configuration of an electro-osmotic pump by allowing the use of a substrate as a current collector. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of manufacturing an electrode that constitutes an electro-osmotic pump, which involves forming fluid pathway in a plate-shaped substrate made of an impermeable substrate material and coating an electrode material on the substrate to obtain an electrode, or coating an electrode material on a plate-shaped substrate made of an impermeable substrate material and forming fluid pathway in the substrate to obtain an electrode, where the impermeable substrate material includes conducting material, a semiconducing material and a non-conducting material. DESCRIPTION OF DRAWING(S) - The drawing shows a configuration of an electro-osmotic pump using impermeable electrodes. 11Membrane 30Frame 130First electrode 150Second electrode