• 专利标题:   Detection chip has temperature sensor that is configured on wide bandgap semiconductor, and is made of temperature sensitive material and detect temperature of wide bandgap semiconductor, and temperature sensitive material is graphene oxide.
  • 专利号:   CN113140652-A
  • 发明人:   JIANG K, SUN X, LI D, BEN J, CHEN Y, JIA Y, ZHANG S
  • 专利权人:   CHANGCHUN INST OPTICS FINE MECHANICS P
  • 国际专利分类:   G01D021/02, H01L031/108, H01L031/18
  • 专利详细信息:   CN113140652-A 20 Jul 2021 H01L-031/108 202170 Pages: 7 Chinese
  • 申请详细信息:   CN113140652-A CN10410661 14 Apr 2021
  • 优先权号:   CN10410661

▎ 摘  要

NOVELTY - The detection chip has a wide band gap semiconductor, which is used to prepare UV detectors, which are used to detect UV radiation. A temperature sensor is configured on the wide bandgap semiconductor, and the temperature sensor is made of a temperature sensitive material and is used to detect the temperature of the wide bandgap semiconductor. The temperature sensitive material is graphene oxide. The wide band gap semiconductor includes a substrate material (1) and a wide band gap semiconductor film arranged on the substrate material, and the wide band gap semiconductor film includes a first epitaxial layer (2) and a second epitaxial layer (3). USE - Detection chip. ADVANTAGE - The detection chip utilizes the temperature-sensitive characteristics of reduced graphene oxide and benefits of abundant raw materials, low cost, and simple process, and at the same time utilizes the benefits of wide-bandgap nitride semiconductors for UV radiation detection. The real-time junction temperature detection function and the monolithic integration of UV detection and temperature detection are realized during the working process of the nitride UV detector. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method of the detection chip. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of the detection chip. Substrate material (1) First epitaxial layer (2) Second epitaxial layer (3) Pair of first electrode (5) Pair of second electrode (6)