▎ 摘　　要

NOVELTY - The system has a substrate supply unit (100) that includes a vacuum state or a standby state, and supplies a substrate in the vacuum state. A substrate processing unit (200) receives a substrate from the substrate supply unit and performs a graphene transfer process. A substrate discharging unit (300) discharges the substrate on which the graphene transfer process is completed in the substrate processing unit. The substrate supply unit includes a first load lock chamber (110) that supplies a substrate loading unit (400) to the substrate processing unit in the vacuum state and a second load lock chamber (120) that supplies a graphene transfer unit (500) with a carrier substrate (530) to which a graphene (510) is adhered to the substrate processing unit in the vacuum state. The substrate loading unit includes a transfer substrate (410) onto which the graphene is transferred and a jig (420) that is seated by inserting the transfer substrate into the seating groove. USE - System for transferring graphene to transfer substrate such as wafer in vacuum equipment. ADVANTAGE - The process time is shortened and deterioration of product quality due to external contamination is prevented. The mass productivity for the graphene transfer process is greatly improved. Since moisture remaining in the substrate loading unit is removed from the substrate supply unit before the graphene transfer process is performed, the graphene transfer quality and mass productivity are improved. The graphene damage and contamination due to the pressure and heat applied to the carrier substrate are prevented by separating the first roll-to-plate process for bonding the graphene and transfer substrate and second roll-to-plate process for heat treatment and separation of the carrier substrate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for transferring graphene to transfer substrate in vacuum equipment. DESCRIPTION OF DRAWING(S) - The drawing shows a plan view of the system for transferring graphene to transfer substrate in vacuum equipment. Substrate supply unit (100) First load lock chamber (110) Second load lock chamber (120) Substrate processing unit (200) Substrate discharging unit (300) Substrate loading unit (400) Transfer substrate (410) Jig (420) Graphene transfer unit (500) Graphene (510) Carrier substrate (530)