• 专利标题:   Graphene FET e.g. single-layer graphene FET, has graphene sheet coupled to top surface of gate layer and top surface of one of source and drain contacts, where gate layer is adapted to influence electric field of graphene sheet.
  • 专利号:   US2014138626-A1, US8809837-B2
  • 发明人:   FARMER D B, FRANKLIN A D, OIDA S, SMITH J T
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   H01L029/66, H01L021/336, H01L029/78
  • 专利详细信息:   US2014138626-A1 22 May 2014 H01L-029/66 201438 Pages: 10 English
  • 申请详细信息:   US2014138626-A1 US971477 20 Aug 2013
  • 优先权号:   US683148, US971477

▎ 摘  要

NOVELTY - The graphene FET (GFET) (200) has a gate layer (202a) coupled to a first graphene sheet (206a) to influence electric field within the first graphene sheet. A top surface of the gate layer is even with a top surface of one of a source contact (210) and a drain contact (212) formed on the first graphene sheet. A second graphene sheet (206b) is coupled to the top surface of the gate layer and the top surface of the one of the source contact and the drain contact opposite to the gate layer. The gate layer is adapted to influence electric field of the second graphene sheet. USE - GFET such as single-layer GFET and double-layer GFET. ADVANTAGE - The GFET is provided with the second graphene sheet, so that performance characteristic of the GFET can be enhanced while maintaining footprint of the GFET at a substrate i.e. silicon substrate, without enlarging a surface area required by the GFET at the substrate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a gate region of a transistor. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a GFET including multiple stacked graphene sheets. GFET (200) Gate layer (202a) Graphene sheets (206a, 206b) Source contact (210) Drain contact (212)