• 专利标题:   Electronic device is a semiconductor-based device such as logic device or a memory device, has substrate, and channel element, and channel element is provided as a channel layer on substrate and separate from substrate.
  • 专利号:   US2021167183-A1, US11538918-B2
  • 发明人:   SHIN H, SHIN K, JO S, LEE Y, HEO J
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/02, H01L029/51
  • 专利详细信息:   US2021167183-A1 03 Jun 2021 H01L-029/51 202158 English
  • 申请详细信息:   US2021167183-A1 US154354 21 Jan 2021
  • 优先权号:   KR111596

▎ 摘  要

NOVELTY - The electronic device (100) comprises a substrate (110), and a channel element (115). The channel element is provided as a channel layer on the substrate and separate from the substrate. A gate electrode (150) is provided on the channel element. A ferroelectric layer (140) is in between the channel element and the gate electrode. A carbon layer (130) is in between the channel element and the ferroelectric layer, and the carbon layer has an sp2 bonding structure. The carbon layer has nanocrystalline graphene that has nano-sized crystals. The substrate further has a source and a drain at both sides of the channel element. The insulating layer is in between the substrate and the carbon layer. USE - Electronic device is a semiconductor-based device such as logic device or a memory device. ADVANTAGE - The current leakage is limited and/or prevented and formation of an undesired Si oxide layer or silicide may also be limited and/or prevented. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of an electronic device. Electronic device (100) Substrate (110) Channel element (115) Carbon layer (130) Ferroelectric layer (140) Gate electrode (150)