• 专利标题:   One-dimensional grating surface incident composite photo-electric detector, has graphene layer modulating function of optical field space distribution, and graphene arranged on first and second inter-digital electrodes.
  • 专利号:   CN103811568-A, CN103811568-B
  • 发明人:   HUANG B, ZHANG Z, CHEN H, CHENG Z
  • 专利权人:   INST SEMICONDUCTORS CHINESE ACAD SCI
  • 国际专利分类:   H01L031/0224, H01L031/0232, H01L031/101
  • 专利详细信息:   CN103811568-A 21 May 2014 H01L-031/0232 201447 Pages: 10 Chinese
  • 申请详细信息:   CN103811568-A CN10060091 21 Feb 2014
  • 优先权号:   CN10060091

▎ 摘  要

NOVELTY - The detector has a graphene layer modulating a function of optical field space distribution. An active layer is formed on a graphene (8) that is arranged on a first inter-digital electrode (4) and a second inter-digital electrode (5). A three-dimensional light field unit is arranged with a silicon strip (7). The first inter-digital electrode is connected with the silicon strip. The second inter-digital electrode is connected with a silicon oxide strip (6). The first and second inter-digital electrodes are made of gold or titanium. USE - One-dimensional grating surface incident composite photo-electric detector. ADVANTAGE - The detector utilizes the incident light by the grating structure of the light field modulation to achieve high response degree and high bandwidth of infrared detection. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a one-dimensional grating surface incident composite photo-electric detector. Inter-digital electrodes (4, 5) Silicon oxide strip (6) Silicon strip (7) Graphene (8)