▎ 摘 要
NOVELTY - The structure has first graphene (24a) that is laminated on multiple layers. The second graphene (31a) is laminated on multiple layers. The edge of first graphene is electrically connected with edge of second graphene. The longitudinal direction of edge of firs graphene and extension direction of edge of second grapheme are arranged in parallel and are extended. The graphenes are integrally formed and embedded-formed in insulating films respectively. The main surfaces of graphenes are intersected with main surfaces of insulating films. USE - Carbon electrically conductive structure used in semiconductor device such as semiconductor memory, solar cell, fuel cell and cold cathode electron source. ADVANTAGE - The simple wiring which exhibit low electrical resistance and low-heat resistance which are excellent in sheet-like graphene or linear carbon nano material is obtained easily and reliably. The reliable carbon electrically conductive structure is achieved effectively. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacturing method of carbon electrically conductive structure involves laminating first graphene on multiple layers. The second graphene is laminated on multiple layers. The edge of first graphene is electrically connected with edge of second graphene. The carbon nano material is embedded-formed in first insulating film. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic perspective view of the formation condition of multilayer interconnection structure. (Drawing includes non-English language text) Wiring structures (2,3) Graphenes (24a,31a) Sheet-like multiple-layered graphene (34a)