• 专利标题:   Gas sensor, has multiple graphene heating assemblies arranged on substrate, power supply unit for supplying electric power to graphene heating assemblies, and graphene layer provided with air stray-type graphene structure.
  • 专利号:   KR1778214-B1
  • 发明人:   KIM C, LIM C, JUNG Y M, LEE D, CHOI J, SEO M, LEE T, KIM J H, LEE S, YOUNG T B
  • 专利权人:   KOREA INST SCI TECHNOLOGY
  • 国际专利分类:   G01N027/04, G01N027/30, G01N027/416, H01L029/16
  • 专利详细信息:   KR1778214-B1 14 Sep 2017 G01N-027/30 201768 Pages: 15
  • 申请详细信息:   KR1778214-B1 KR074513 15 Jun 2016
  • 优先权号:   KR074513

▎ 摘  要

NOVELTY - The sensor has multiple graphene heating assemblies (21) arranged on a substrate (1). A power supply unit (3) supplies electric power to the graphene heating assemblies. The graphene heating assemblies are provided with a electrode, which is electrically connected to the power supply unit. A graphene layer is electrically connected to the electrode. The graphene layer is separated from the substrate. A measuring unit (4) measures temperature in which adsorption reaction of object gas is made. The graphene layer is provided with an air stray-type graphene structure. USE - Gas sensor. ADVANTAGE - The sensor permits low size electricity in an air-stray type graphene so as to increase gas reaction when low power gas sensor can be implemented. The sensor includes the air stray-type graphene to organize array configuration in which heating temperature is differently gradient through structure control of the heating assembly, so that different reactivity about the object gas can be simultaneously extracted, thus increasing wafer level. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a gas method sensing. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic block diagram of a gas sensor. Substrate (1) Power supply unit (3) Measuring unit (4) Graphene heating assemblies (21) Graphene heating assembly (22)