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  • 专利标题:   Defect repairing method of graphene film e.g. planar crystalline carbon film, involves irradiating laser by giving carbon source to portion identified as defect portion of film, and restoring local defect of film.
  • 专利号:   JP2014238377-A, JP6176711-B2
  • 发明人:   OKIKAWA Y, ISHIHARA M, OMURA H, HASEGAWA M
  • 专利权人:   DOKURITSU GYOSEI HOJIN SANGYO GIJUTSU SO, NAT INST ADVANCED IND SCI TECHNOLOGY
  • 国际专利分类:   B82Y035/00, B82Y040/00, C01B031/02, G01N021/59, G01N021/65, C01B032/184
  • 专利详细信息:   JP2014238377-A 18 Dec 2014 G01N-021/65 201503 Pages: 17 Japanese
  • 申请详细信息:   JP2014238377-A JP122187 10 Jun 2013
  • 优先权号:   JP122187

▎ 摘　　要

NOVELTY - The method involves performing a resonance Raman-scattering measurement by repair of defect portion of local region. The local region where D band appears is identified as defect portion of graphene film (10) by the spectrum obtained by resonance Raman-scattering measurement, when largest peak intensity within the range more than 1310cm-1 and below 1350cm-1 is set to D. A laser is irradiated by giving carbon source to the portion identified as defect portion of graphene film, and local defect of a graphene film is restored by filling the defect with carbon source. USE - Defect repairing method of graphene film such as planar crystalline carbon film. ADVANTAGE - The local transmittance of the micrometer order of graphene film is measured effectively. DETAILED DESCRIPTION - The method involves irradiating laser for measurement to the local region of graphene film. The transmittance is measured, and the defect portion of graphene film is detected. The fluctuation in the number of layers of the graphene film is computed based on the transmittance. The fluctuation in the number of layers of graphene film is repaired by irradiating the strong bigger laser for repair than the intensity of laser for measurement. An INDEPENDENT CLAIM is included for a transmittance measuring apparatus of graphene film, has laser light source (110) that oscillates the laser of predetermined wavelength. A detector (130) measures the intensity of laser for transmitting the graphene film provided on the base material. The laser is irradiated to the local position of graphene film provided on the substrate which transmits the laser positioned between laser light source and filter (150). The detector is provided to detect the intensity of laser that transmits graphene film through filter. The graphene film is provided on the base material which is mounted in a movable stage. The resonance Raman-scattering measurement is performed with respect to the graphene film. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the transmittance measuring apparatus. Graphene film (10) Base material (50) Laser light source (110) Detector (130) Filter (150)