• 专利标题:   Crystalline carbon substrate material has surface that is flattened by forming single layer or multiple layers of metal film having thickness of 100 nm or more on substrate surface by vacuum film forming process and hot-pressing entire surface in vicinity of melting point of metal film.
  • 专利号:   JP2023060560-A
  • 发明人:   HIRAI A
  • 专利权人:   HIRAI A
  • 国际专利分类:   B32B007/027, B32B007/12, B32B009/00, H01L023/36
  • 专利详细信息:   JP2023060560-A 28 Apr 2023 B32B-009/00 202341 Pages: 10 Japanese
  • 申请详细信息:   JP2023060560-A JP170223 18 Oct 2021
  • 优先权号:   JP170223

▎ 摘  要

NOVELTY - The crystalline carbon substrate material (1) has a surface flattened by forming a single layer or multiple layers of a metal film having a thickness of 100 nm or more on a substrate surface by a vacuum film forming process and hot-pressing the entire surface in the vicinity of the melting point of the metal film. The metal surfaces are laminated and bonded together. The metal is metallic or alloy of titanium, silicon, nickel, aluminum, iron, copper and tin has a melting point of 300 degree C or less. The surface of the crystalline carbon substrate is heated at a temperature higher than or equal to a melting point of the uppermost metal. The temperature is lowered to a temperature lower than or equal to the melting point. The pressure is released and the surface of the crystalline carbon substrate is flattened and laminated. USE - Crystalline carbon substrate material such as graphite and graphene used for heat dissipation or cooling mechanism such as semiconductor and electronic device such as on-vehicle apparatus. ADVANTAGE - The carbon substrate is prevented peeling being scattered. The crystalline carbon substrate is improved in strength as a bulk by bending a large number of layers of graphene crystals in the substrate sheet. The crystalline carbon substrate is improved in safety and handleability by surface metallization. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic diagram of lamination bonding of crystalline carbon substrate. (Drawing includes non-English Language text) 1Crystalline carbon substrate material 2Alloy film 3Stage 4Chamber