• 专利标题:   Method for opening double-layer graphene band gap in semiconductor device, involves using first molecular layer for electronic doping double layer graphene, and second molecular layer to perform hole doping of double-layered graphene to open band gap.
  • 专利号:   CN115568261-A, CN115568261-B
  • 发明人:   ZHANG D, FAN X, ZHANG H, ZENG C
  • 专利权人:   UNIV CHINA SCI TECHNOLOGY
  • 国际专利分类:   H10K030/00, H10K030/81, H10K071/10, H10K071/60
  • 专利详细信息:   CN115568261-A 03 Jan 2023 H10K-071/10 202319 Chinese
  • 申请详细信息:   CN115568261-A CN11533021 02 Dec 2022
  • 优先权号:   CN11533021

▎ 摘  要

NOVELTY - The method involves setting a double-layer graphene band gap between a first molecular layer and a second molecular layer. The first molecular sheet is used to perform electronic doping of the double graphene and the second molecular sheet to perform hole-doping of the dual graphene to form a double graphene band gaps. The double graphene is arranged between the first molecular layers. USE - Method for opening a double-layer graphene band gap in a semiconductor device and nano-electro-mechanical system (MEMS) device. ADVANTAGE - The method enables opening a double-layer graphene band gap in the semiconductor device with convenient operation, simple device structure, and wide application, and avoiding traditional electric grid voltage control method of micro-nano processing process for applying the double-layer graphene to the semiconductor electronic device field, and avoiding pollution of the organic residue to affect material properties. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a double-layer graphene device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a double-layer graphene device. 10Functional substrate 11Silicon substrate 12Silicon dioxide layer 13First molecular layer