• 专利标题:   Laminate used in electronic device, comprises base portion composed of silicon carbide and having specific surface which is silicon surface and graphene film on specific surface, where ion mass distribution in depth direction of laminate obtained by time-of-flight secondary ion mass spectrometry.
  • 专利号:   JP2021138559-A
  • 发明人:   MIHASHI F, ADACHI M, YAMAMOTO Y, TATENO Y
  • 专利权人:   SUMITOMO ELECTRIC IND LTD
  • 国际专利分类:   C01B032/184, B32B018/00, C01B032/956, G01N027/62
  • 专利详细信息:   JP2021138559-A 16 Sep 2021 C01B-032/184 202183 Pages: 18 Japanese
  • 申请详细信息:   JP2021138559-A JP035652 03 Mar 2020
  • 优先权号:   JP035652

▎ 摘  要

NOVELTY - Laminate (11) comprises a base portion (12) composed of silicon carbide and having a first surface which is a silicon surface, a graphene film (13) that is arranged on the first surface, has a second surface which is a main surface on the opposite side to the side where the base portion is located, and has two or more atomic layers, where ion mass distribution in the depth direction of the laminate obtained by time-of-flight secondary ion mass spectrometry using bismuth ion as a primary ion and cesium ion as a sputter ion; the value obtained by dividing the maximum value of the detection intensity of 1,3,5-hexatriynylradical ions by the maximum value of the detection intensity of 6C ions is 0.48-1; and the absolute value of the difference of the depth from the second surface in which the detection strength of the 1,3,5-hexatriynylradical ion shows the maximum value, and the depth from the second surface in which the detection strength of the 6C ion shows the maximum value is less than or equal to 1 nm. USE - The laminate is useful in an electronic device. ADVANTAGE - The laminate is capable of obtaining high electrical characteristics and can be particularly advantageously applied when the electronic device can be obtained laminates and high modulation characteristic that can obtain high electric characteristics are required. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an electronic device comprising the laminate, a first electrode arranged on the second surface and a second electrode arranged on the second surface apart from the first electrode. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic cross-sectional view of a structure of the laminate. Laminate (11) Base portion (12) First side (12A) Graphene film (13) Main surface (13B)