▎ 摘　　要

NOVELTY - The controller has a packaging tube cap (1) fixed on a packaging tube shell (2). An end of the packaging tube cap is provided with an air inlet (3). Another end of the packaging tube cap is provided with an air outlet. An inner end of the packaging tube cap is provided with a silicon substrate that is fixed on the packaging tube shell. The silicon substrate is provided with an insulating layer for isolating a temperature sensitive element and a heating element. A lead column is fixed below a lead protection layer and fixed in the packaging tube shell. The protective film is made of silicon nitride film. The lead protection layer is made of epoxy resin. USE - Micro high precision gas flow controller. ADVANTAGE - The controller improves sensitivity of the thermal sensor and effectively improves response speed of the device as high thermal conductivity of graphene material such that control of the gas flow is realized. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a micro high precision gas flow controller. Packaging tube cap (1) Packaging tube shell (2) Air inlet (3) Lead (11)