• 专利标题:   Graphene and nano-wire heterojunction detector switch ratio improving method, involves growing epitaxy indium arsenic nano-wire on gallium arsenic substrate, and forming graphene leakage terminal of substrate as gate electrode.
  • 专利号:   CN104538489-A
  • 发明人:   CHEN P, CHEN X, GUO N, HU W, LI T, MIAO J, LU W, WANG P, LUO W
  • 专利权人:   SHANGHAI TECH PHYSICS INST CHINESE ACAD
  • 国际专利分类:   H01L031/18
  • 专利详细信息:   CN104538489-A 22 Apr 2015 H01L-031/18 201547 Pages: 7 Chinese
  • 申请详细信息:   CN104538489-A CN10748536 09 Dec 2014
  • 优先权号:   CN10748536

▎ 摘  要

NOVELTY - The method involves growing an epitaxy indium arsenic (InAs) nano-wire on a gallium arsenic (GaAs) substrate by adopting beam epitaxy technology. Characteristic length and diameter of the nano-wire are determined by utilizing a scanning electron microscope. A silicon dioxide P-type single layer is arranged on the substrate. The epitaxy nano-wire is transferred into single layer graphite rare earth nitrate. Chromium and gold are deposited on the nano-line to form a source leakage electrode. A graphene leakage terminal of the substrate is formed as a gate electrode. USE - Graphene and nano-wire heterojunction detector switch ratio improving method. ADVANTAGE - The method enables improving detecting quality and optimizing effect. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of an graphene and nano-wire heterojunction detector.'(Drawing includes non-English language text)'