• 专利标题:   Silicon carbide substrate graphene production device includes quartz heating cavity, heating cavity inner bucket, heating chamber, opening cavity, top cover, temperature measuring window, air inlet, air outlet and cooling water exit.
  • 专利号:   CN203593622-U
  • 发明人:   GAO Y, SONG J, WANG J, ZHANG H
  • 专利权人:   SICC SCI TECHNOLOGY CO LTD
  • 国际专利分类:   C01B031/04, C23C016/56
  • 专利详细信息:   CN203593622-U 14 May 2014 C01B-031/04 201455 Pages: 11 Chinese
  • 申请详细信息:   CN203593622-U CN20664729 25 Oct 2013
  • 优先权号:   CN20664729

▎ 摘  要

NOVELTY - This utility new type belongs to new material technology field, claims a one using a high temperature annealing preparation graphene up silicon carbide substrate of device, wherein the device comprise quartz heating cavity and a set of graphite bucket use the heating cavity inner, use a time bucket is placed in the graphite inner cavity, of using conventional radio frequency heating method for the heating a graphene, wherein the quartz comprise inner heating chamber is provided with a hollow interlayer of upper opening cavity and a top cover, inner cavity insulating layer., heat preservation layer is heat preservation layer middle part groove, using a graphite bucket comprise of upper end opening of bucket body, bucket body bottom upper surface with a groove, the upper graphite. bucket upper part side wall up. with a location block, the location block is provided with hot reflecting screen, using device of such a structure, the heating uniformity and efficiency is high, the heat loss is little, the using through high temperature annealing preparation graphene up silicon carbide substrate, improves the purity of graphite, saves the production cost and improves the production efficiency.