• 专利标题:   Semiconductor device, has substrate provided with pattern layer, graphene layer formed on pattern layer along predetermined direction, and film layer arranged between substrate and graphene layer, where graphene layer is provided with sheet.
  • 专利号:   KR1150270-B1
  • 发明人:   LEE J K, KIM G T, KIM Y
  • 专利权人:   UNIV KOREA RES BUSINESS FOUND
  • 国际专利分类:   H01L021/335, H01L029/778
  • 专利详细信息:   KR1150270-B1 12 Jun 2012 H01L-029/778 201243 Pages: 9
  • 申请详细信息:   KR1150270-B1 KR007951 26 Jan 2011
  • 优先权号:   KR007951

▎ 摘  要

NOVELTY - The device has a substrate provided with a pattern layer. A graphene layer is formed on the pattern layer along predetermined direction. The graphene layer is provided with a graphene sheet. A passivation layer is formed on the graphene layer. An electrode layer is provided with the graphene layer. An isolation film layer is arranged between the substrate and the graphene layer. USE - Semiconductor device. ADVANTAGE - The device has better productivity, on/off current ratio, and semiconductor property of the graphene layer. The device can facilitate base-gap control of the grapheme layer, can facilitate switching speed, and is convenient to manufacture. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a semiconductor device manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a semiconductor device.