▎ 摘 要
NOVELTY - Forming a graphene layer, involves: (a) forming a metal thin film on a substrate; (b) injecting carbon ions into the metal thin film; and (c) heat-treating the carbon ions injected into the metal thin film to form a graphene layer on the metal thin film. USE - For forming a graphene layer (claimed) used in electric devices, transparent electrodes, semiconductor memory devices, or microwave circuits. ADVANTAGE - The graphene layer is formed by uniformly injecting an accurate amount of carbon ions into a metal thin film depending on the maximum solubility of carbon in the metal thin film and then heat-treating the injected carbon ions, thus uniformly forming the graphene layer on the metal thin film. Since hydrocarbon gas is not additionally used in a process of forming the graphene layer, a reactor is not contaminated, so that the internal environment of the reactor can be maintained constant, thus ensuring reproducible formation of the graphene layer.