▎ 摘 要
NOVELTY - The sensor has a structure made of a top gate electrode, a nickel-chromium alloy film, an upper silicon dioxide layer, a hydrogen silsesquioxane, a double graphene layer, a source-drain electrode, a lower silicon dioxide layer, silicon substrate, and a back gate electrode arranged from up to down. The double-layer graphene is deposited with 300nm thickness using a machinery stripping process. An electron beam photo-etching technique is used on a source end and a drain end for manufacturing an electrode. USE - Graphene temperature sensor for use in an aerospace field. ADVANTAGE - The sensor has high sensitivity, low intrinsic noise, high detecting speed and better application prospect in the aerospace field. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene temperature sensor preparation method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene temperature sensor. '(Drawing includes non-English language text)'