▎ 摘　　要

NOVELTY - The flexible humidity sensor has a hydrophobic porous polytetrafluoroethylene substrate (1), a metal electrode layer (2), a hydrophobic porous polytetrafluoroethylene isolating layer (3), a humidity sensitive material layer (4), and a hydrophobic porous polytetrafluoroethylene material protective layer (5) which are arranged from bottom to top. The metal electrode layer is a silver electrode and is formed on the hydrophobic porous polytetrafluoroethylene substrate by a screen printing process. The thickness of the hydrophobic porous polytetrafluoroethylene substrate is between 0.18mm-0.22mm. The pore diameter of the micropore is between 0.22um-0.8 mu m. The humidity sensitive material layer (4) is a graphene oxide sensitive material. USE - Flexible humidity sensor used in semiconductor, food processing, medical and weather treatment. ADVANTAGE - The sensor can effectively reduce capacitance loss under high humidity. The outermost layer is provided with a layer of hydrophobic porous polytetrafluoroethylene material protective layer, which can be waterproof and antifouling. The sensor has good ventilation property, and does not affect performance of the device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method of the flexible humidity sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the flexible humidity sensor. Hydrophobic porous polytetrafluoroethylene substrate (1) Metal electrode layer (2) Hydrophobic porous polytetrafluoroethylene isolating layer (3) Humidity sensitive material layer (4) Hydrophobic porous polytetrafluoroethylene material protective layer (5)