• 专利标题:   Method of patterning for forming graphene on target device, involves transferring graphene grown on metal substrate by vapor deposition to target device and patterned graphene film is eventually transferred to target device.
  • 专利号:   CN106624371-A, CN106624371-B
  • 发明人:   YUAN K, TAN H
  • 专利权人:   WUXI GRAPHENE FILM CO LTD
  • 国际专利分类:   B23K026/362, C23C016/56
  • 专利详细信息:   CN106624371-A 10 May 2017 B23K-026/362 201736 Pages: 11 Chinese
  • 申请详细信息:   CN106624371-A CN11243053 29 Dec 2016
  • 优先权号:   CN11243053

▎ 摘  要

NOVELTY - The method involves transferring graphene grown on a metal substrate by vapor deposition to the target device to be applied and is not transferred to the target device. The graphene film is patterned and the patterned graphene film is eventually transferred to a target device (4). The metal foil (1) with good graphene is bonded to the base film (3) to form a composite structure of metal foil/graphene/base film. The metal foil is etched off by the etching solution, and graphene is retained on the base film to form a composite film structure of graphene/base film. USE - Method of patterning for forming graphene on target device. ADVANTAGE - The high quality patterned graphene is transferred to complex devices. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the method of patterning for forming graphene on target device. Metal foil (1) Alkene (2) Base film (3) Target device (4) ITO conducting layer (5)