• 专利标题:   Suspended graphene propagating plasmon waveguide device, comprises substrate, graphene layer and electrode, where electrode arranged in order from bottom to top.
  • 专利号:   CN108428986-A
  • 发明人:   DAI Q, HU H, YANG X, HU D, LIU M, GUO X
  • 专利权人:   NAT CENT NANOSCIENCE TECHNOLOGY CHINA
  • 国际专利分类:   H01P003/00, H01P011/00
  • 专利详细信息:   CN108428986-A 21 Aug 2018 H01P-003/00 201866 Pages: 11 Chinese
  • 申请详细信息:   CN108428986-A CN10110711 05 Feb 2018
  • 优先权号:   CN10110711

▎ 摘  要

NOVELTY - A suspended graphene propagating plasmon waveguide device comprises substrate, a graphene layer and an electrode, where the electrode arranged in order from bottom to top, the substrate comprises pore structure for supporting the graphene layer and the electrode, graphene layer covers the pore structure of the substrate to form a suspended graphene structure and electrodes are placed over the graphene layer for electrical measurement and electrostatic regulation of graphene carrier concentration. USE - Suspended graphene propagating plasmon waveguide device. ADVANTAGE - The suspended graphene propagating plasmon waveguide device has low attenuation and long-wavelength transmission distance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for preparing suspended graphene propagating plasmon waveguide device, which involves selecting substrate and forming a multiples of pore structures on the substrate by mechanical processing, drying method or wet etching, preparing graphene film, placing graphene film on the substrate and covering the pore structure to obtain a suspended graphene layer, preparing electrode structure by thermal evaporation, electron beam evaporation, focused ion deposition and magnetron sputtering, doping graphene layer, using a chemical doping method or electrostatic doping using an electrode grid voltage and directly exciting by the scattered light of the mid-infrared scattering type scanning near-field optical microscope tip or the plasmon by the incident light to the boundary of the pore structure, the near-field is scanned using the mid-infrared scattering type and scanning the optical microscope tip surface of the suspended graphene-transmitting plasmon waveguide device to obtain the finished product.